OPENTECHNICAL PUBLICATION
OT-2026-000000076

Charging system and method for controlling charging system

Published: 2026-09-15T19:02:27.755484Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000076
Categories: Manufacturing & Assembly Equipment > Surface Treatment

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ABSTRACT

A charging system according to this disclosure includes a particle absorption
tool configured to be electrostatically charged so as to build up a static
electric charge for absorbing particles; a charger configured to
electrostatically charge the particle absorption tool so as to build up the
static electric charge; and a charger container configured to accommodate the
charger, arranged in a place where a FOUP for accommodating substrates is
arranged, and having an opening that is opened toward an interior of a
substrate conveyor.

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OpenTechnical publication OT-2026-000000076
Published 2026-09-15T19:02:27.755484Z
https://opentechnical.org/p/OT-2026-000000076