OPENTECHNICAL PUBLICATION
OT-2026-000000119

Apparatus and methods for verifying alignment between a shadow ring and a substrate

Published: 2026-09-15T19:02:30.537874Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000119
Categories: Sensors, Controls & Machine Vision > Position and Presence Sensing

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ABSTRACT

Methods and apparatus for verifying alignment between an opaque shadow ring
and a substrate are provided. In some embodiments, the apparatus includes a
tool comprising: a transparent ring having an inner edge defining a central
opening and an outer edge and having a top side and a bottom side; a gauge
mark on or in the transparent ring spaced between the inner edge and the outer
edge, the gauge mark extending around the inner edge; and a pin extending from
the bottom side of the transparent ring and located between the gauge mark and
the outer edge.

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OpenTechnical publication OT-2026-000000119
Published 2026-09-15T19:02:30.537874Z
https://opentechnical.org/p/OT-2026-000000119