---
publication_id: "OT-2026-000000262"
title: "Apparatus for ultrasonically measuring thin film thickness with retroreflector and method thereof"
published_at: "2026-09-15T19:02:40.560612Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000000262"
categories:
  - "sensors-controls-machine-vision/position-and-presence-sensing"
keywords:
  - "g01b17/025"
  - "g01b17/02"
  - "g01n2291/011"
  - "g01n2291/02854"
  - "g01n2291/0421"
  - "g01n2291/0422"
---

# Apparatus for ultrasonically measuring thin film thickness with retroreflector and method thereof

## Abstract

A thin film thickness measuring apparatus includes: an ultrasonic retroreflector that is provided under a test object formed in the shape of a thin film and retroreflects an ultrasonic wave incident through the test object; an ultrasonic wave input portion that is provided on one side of the test object and inputting an ultrasonic wave to one side of the test object; and a measurement portion that is connected to the ultrasonic wave input portion and measures an arrival time of the ultrasonic wave reflected through the test object.