OPENTECHNICAL PUBLICATION
OT-2026-000000262

Apparatus for ultrasonically measuring thin film thickness with retroreflector and method thereof

Published: 2026-09-15T19:02:40.560612Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000262
Categories: Sensors, Controls & Machine Vision > Position and Presence Sensing

------------------------------------------------------------------------

ABSTRACT

A thin film thickness measuring apparatus includes: an ultrasonic
retroreflector that is provided under a test object formed in the shape of a
thin film and retroreflects an ultrasonic wave incident through the test
object; an ultrasonic wave input portion that is provided on one side of the
test object and inputting an ultrasonic wave to one side of the test object;
and a measurement portion that is connected to the ultrasonic wave input
portion and measures an arrival time of the ultrasonic wave reflected through
the test object.

------------------------------------------------------------------------

OpenTechnical publication OT-2026-000000262
Published 2026-09-15T19:02:40.560612Z
https://opentechnical.org/p/OT-2026-000000262