OPENTECHNICAL PUBLICATION
OT-2026-000000350

Rinsing device for rinsing blue film at bottom of wafer

Published: 2026-09-15T19:02:46.803875Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000350
Categories: Manufacturing & Assembly Equipment > Surface Treatment

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ABSTRACT

A rinsing device for rinsing a blue film at the bottom of a wafer, including:
a base; a water tank; at least one drum disposed in the water tank and
partially exposed and vertically protruded from the water tank; at least one
drum driver; two vertically-movable scraper sets disposed at the base,
flanking the water tank, and each having a scraper, a water collection chamber
and a vertically-movable driver, with the scraper disposed above the water
collection chamber, the water collection chamber disposed at the
vertically-movable driver, and the vertically-movable driver disposed at the
base and adapted to drive the water collection chamber and the scraper moving
vertically; and a water tray disposed at the base, positioned at the water
tank, and positioned below the two scrapers and the two water collection
chambers.

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OpenTechnical publication OT-2026-000000350
Published 2026-09-15T19:02:46.803875Z
https://opentechnical.org/p/OT-2026-000000350