{
  "abstract": "Methods, systems, and media for optimization of fabrication processes are provided. In some implementations, a method of automatically optimizing fabrication processes comprises: (a) providing a first set of process parameter values associated with a first experiment to a model representing a fabrication process; (b) characterizing a statistical uncertainty of predictions made by the model; (c) using an acquisition function to select a second set of process parameter values, wherein the acquisition function identifies the second set of process parameters based on both: (i) a difference between predicted wafer characteristics and a target specification; and (ii) the statistical uncertainty; (d) receiving results of the fabrication process performed using the second set of process parameter values; and (e) determining whether the performance of the fabrication process generates a post-processed wafer having wafer characteristics that meet the target specification.",
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  "source_date": "2026-04-16",
  "source_id": "US-2026104696-A1",
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  "title": "Optimization of fabrication processes",
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