---
publication_id: "OT-2026-000000490"
title: "Optimization of fabrication processes"
published_at: "2026-09-15T19:02:57.763010Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000000490"
categories:
  - "sensors-controls-machine-vision/industrial-control"
keywords:
  - "g05b19/41885"
  - "g05b2219/23005"
  - "g05b2219/2602"
---

# Optimization of fabrication processes

## Abstract

Methods, systems, and media for optimization of fabrication processes are provided. In some implementations, a method of automatically optimizing fabrication processes comprises: (a) providing a first set of process parameter values associated with a first experiment to a model representing a fabrication process; (b) characterizing a statistical uncertainty of predictions made by the model; (c) using an acquisition function to select a second set of process parameter values, wherein the acquisition function identifies the second set of process parameters based on both: (i) a difference between predicted wafer characteristics and a target specification; and (ii) the statistical uncertainty; (d) receiving results of the fabrication process performed using the second set of process parameter values; and (e) determining whether the performance of the fabrication process generates a post-processed wafer having wafer characteristics that meet the target specification.