OPENTECHNICAL PUBLICATION
OT-2026-000000490

Optimization of fabrication processes

Published: 2026-09-15T19:02:57.763010Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000490
Categories: Sensors, Controls & Machine Vision > Industrial Control

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ABSTRACT

Methods, systems, and media for optimization of fabrication processes are
provided. In some implementations, a method of automatically optimizing
fabrication processes comprises: (a) providing a first set of process
parameter values associated with a first experiment to a model representing a
fabrication process; (b) characterizing a statistical uncertainty of
predictions made by the model; (c) using an acquisition function to select a
second set of process parameter values, wherein the acquisition function
identifies the second set of process parameters based on both: (i) a
difference between predicted wafer characteristics and a target specification;
and (ii) the statistical uncertainty; (d) receiving results of the fabrication
process performed using the second set of process parameter values; and (e)
determining whether the performance of the fabrication process generates a
post-processed wafer having wafer characteristics that meet the target
specification.

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OpenTechnical publication OT-2026-000000490
Published 2026-09-15T19:02:57.763010Z
https://opentechnical.org/p/OT-2026-000000490