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  "abstract": "A shape profile measurement device includes a light source emitting an optical pulse stream, a relay optical system configured to receive the optical pulse stream, generate an electrical pulse stream from a first portion of the optical pulse stream, generate a chromatically dispersed light over a plurality of wavelengths from a second portion of the optical pulse stream, provide the chromatically dispersed light to a measurement target, and output a reflected optical pulse stream reflected from the measurement target, a detector configured to receive the electrical pulse stream and the reflected optical pulse stream and detect a phase difference between the electrical pulse stream and the reflected optical pulse stream, and a processor configured to generate a shape profile of the measurement target using the phase difference.",
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  "title": "Shape profile measurement device, shape profile measurement method, and semiconductor device manufacturing method including the same",
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