---
publication_id: "OT-2026-000000494"
title: "Shape profile measurement device, shape profile measurement method, and semiconductor device manufacturing method including the same"
published_at: "2026-09-15T19:02:58.166316Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000000494"
categories:
  - "sensors-controls-machine-vision/position-and-presence-sensing"
keywords:
  - "g01b11/2518"
  - "h10p74/203"
---

# Shape profile measurement device, shape profile measurement method, and semiconductor device manufacturing method including the same

## Abstract

A shape profile measurement device includes a light source emitting an optical pulse stream, a relay optical system configured to receive the optical pulse stream, generate an electrical pulse stream from a first portion of the optical pulse stream, generate a chromatically dispersed light over a plurality of wavelengths from a second portion of the optical pulse stream, provide the chromatically dispersed light to a measurement target, and output a reflected optical pulse stream reflected from the measurement target, a detector configured to receive the electrical pulse stream and the reflected optical pulse stream and detect a phase difference between the electrical pulse stream and the reflected optical pulse stream, and a processor configured to generate a shape profile of the measurement target using the phase difference.