OPENTECHNICAL PUBLICATION
OT-2026-000000494

Shape profile measurement device, shape profile measurement method, and semiconductor device manufacturing method including the same

Published: 2026-09-15T19:02:58.166316Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000494
Categories: Sensors, Controls & Machine Vision > Position and Presence Sensing

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ABSTRACT

A shape profile measurement device includes a light source emitting an optical
pulse stream, a relay optical system configured to receive the optical pulse
stream, generate an electrical pulse stream from a first portion of the
optical pulse stream, generate a chromatically dispersed light over a
plurality of wavelengths from a second portion of the optical pulse stream,
provide the chromatically dispersed light to a measurement target, and output
a reflected optical pulse stream reflected from the measurement target, a
detector configured to receive the electrical pulse stream and the reflected
optical pulse stream and detect a phase difference between the electrical
pulse stream and the reflected optical pulse stream, and a processor
configured to generate a shape profile of the measurement target using the
phase difference.

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OpenTechnical publication OT-2026-000000494
Published 2026-09-15T19:02:58.166316Z
https://opentechnical.org/p/OT-2026-000000494