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  "abstract": "A valve includes: a housing having a flow path of fluid in the housing; and a valve body provided rotatably with respect to the housing, and configured to open and close the flow path, wherein the housing has a housing seal surface that surrounds the flow path, wherein the valve body has a valve body seal surface, which is formed on an outer periphery portion of the valve body and faces the housing seal surface when the valve body is located at a closing position for closing the flow path, and wherein the valve body seal surface faces a closing rotation direction of the valve body for closing the flow path, over an entire circumference of the outer periphery portion.",
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  "source_date": "2026-04-16",
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  "title": "Valve and substrate processing apparatus",
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