---
publication_id: "OT-2026-000000537"
title: "Valve and substrate processing apparatus"
published_at: "2026-09-15T19:03:02.965505Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000000537"
categories:
  - "industrial-motion-power-transmission/fluid-power"
keywords:
  - "f16k5/0605"
  - "c23c16/4412"
  - "f16k5/0663"
---

# Valve and substrate processing apparatus

## Abstract

A valve includes: a housing having a flow path of fluid in the housing; and a valve body provided rotatably with respect to the housing, and configured to open and close the flow path, wherein the housing has a housing seal surface that surrounds the flow path, wherein the valve body has a valve body seal surface, which is formed on an outer periphery portion of the valve body and faces the housing seal surface when the valve body is located at a closing position for closing the flow path, and wherein the valve body seal surface faces a closing rotation direction of the valve body for closing the flow path, over an entire circumference of the outer periphery portion.