OPENTECHNICAL PUBLICATION
OT-2026-000000537

Valve and substrate processing apparatus

Published: 2026-09-15T19:03:02.965505Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000537
Categories: Industrial Motion & Power Transmission > Fluid Power

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ABSTRACT

A valve includes: a housing having a flow path of fluid in the housing; and a
valve body provided rotatably with respect to the housing, and configured to
open and close the flow path, wherein the housing has a housing seal surface
that surrounds the flow path, wherein the valve body has a valve body seal
surface, which is formed on an outer periphery portion of the valve body and
faces the housing seal surface when the valve body is located at a closing
position for closing the flow path, and wherein the valve body seal surface
faces a closing rotation direction of the valve body for closing the flow
path, over an entire circumference of the outer periphery portion.

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OpenTechnical publication OT-2026-000000537
Published 2026-09-15T19:03:02.965505Z
https://opentechnical.org/p/OT-2026-000000537