{
  "abstract": "A shape profile measurement device includes a light source configured to generate and emit a light signal, a relay optical system configured to receive the light signal from the light source, perform axial chromatic aberration on the light signal, emit a chromatically dispersed light signal over a plurality of wavelengths to a measurement target, and output a reflected light signal reflected from the measurement target, wherein the chromatically dispersed light signal is focused at different positions along an optical axis of the light signal, a detector configured to detect a wavelength of the reflected light signal, among the plurality of wavelengths, received from the relay optical system; and a processor configured to calculate a shape profile of the measurement target based on a focal position of the wavelength of the reflected light signal.",
  "canonical_url": "https://opentechnical.org/p/OT-2026-000000559",
  "categories": [
    "sensors-controls-machine-vision/position-and-presence-sensing"
  ],
  "extent": {
    "figures": 0,
    "paragraphs": 0,
    "words": 133
  },
  "figures": [],
  "files": [
    {
      "bytes": 10220,
      "media_type": "text/html; charset=utf-8",
      "name": "index.html",
      "sha256": "f1b2eaf21b1743d9f328debe99f7b010c78fd049892a33ace27652967b75a9d2"
    },
    {
      "bytes": 1432,
      "media_type": "text/markdown; charset=utf-8",
      "name": "publication.md",
      "sha256": "663cd908d4fd92b2d35e9ccabb10bc3c96ece738bfc4ab0f1a5f002bece6395c"
    },
    {
      "bytes": 1498,
      "media_type": "text/plain; charset=utf-8",
      "name": "publication.txt",
      "sha256": "ca94563e4a66dc25a1dbe7fd33559f0dab37999716d520893b8dd53e3d077580"
    }
  ],
  "integrity": {
    "hash_algorithm": "sha256",
    "keys_url": "https://opentechnical.org/integrity/keys",
    "record_url": "https://opentechnical.org/p/OT-2026-000000559/integrity",
    "signature_algorithm": "Ed25519",
    "signature_file": "manifest.sig",
    "verify_url": "https://opentechnical.org/integrity/verify"
  },
  "keywords": [
    "g01b9/02058",
    "g01b2210/56",
    "g01b9/02041"
  ],
  "language": "en",
  "license": {
    "name": "Creative Commons Attribution 4.0 International",
    "url": "https://creativecommons.org/licenses/by/4.0/"
  },
  "publication_id": "OT-2026-000000559",
  "published_at": "2026-09-15T19:03:04.731299Z",
  "publisher": "Nebula Innovations Limited",
  "record_type": "record",
  "schema": "opentechnical-publication-manifest/1.0",
  "source_date": "2026-04-16",
  "source_id": "US-2026104244-A1",
  "source_name": "the United States Patent and Trademark Office",
  "source_url": "https://patents.google.com/patent/US2026104244A1",
  "supersedes": null,
  "title": "Shape profile measurement device, shape profile measurement method, and semiconductor manufacturing method including the same",
  "uuid": "01a0a673-891a-7793-8e17-0242082f85b7"
}