---
publication_id: "OT-2026-000000559"
title: "Shape profile measurement device, shape profile measurement method, and semiconductor manufacturing method including the same"
published_at: "2026-09-15T19:03:04.731299Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000000559"
categories:
  - "sensors-controls-machine-vision/position-and-presence-sensing"
keywords:
  - "g01b9/02058"
  - "g01b2210/56"
  - "g01b9/02041"
---

# Shape profile measurement device, shape profile measurement method, and semiconductor manufacturing method including the same

## Abstract

A shape profile measurement device includes a light source configured to generate and emit a light signal, a relay optical system configured to receive the light signal from the light source, perform axial chromatic aberration on the light signal, emit a chromatically dispersed light signal over a plurality of wavelengths to a measurement target, and output a reflected light signal reflected from the measurement target, wherein the chromatically dispersed light signal is focused at different positions along an optical axis of the light signal, a detector configured to detect a wavelength of the reflected light signal, among the plurality of wavelengths, received from the relay optical system; and a processor configured to calculate a shape profile of the measurement target based on a focal position of the wavelength of the reflected light signal.