OPENTECHNICAL PUBLICATION
OT-2026-000000559

Shape profile measurement device, shape profile measurement method, and semiconductor manufacturing method including the same

Published: 2026-09-15T19:03:04.731299Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000559
Categories: Sensors, Controls & Machine Vision > Position and Presence Sensing

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ABSTRACT

A shape profile measurement device includes a light source configured to
generate and emit a light signal, a relay optical system configured to receive
the light signal from the light source, perform axial chromatic aberration on
the light signal, emit a chromatically dispersed light signal over a plurality
of wavelengths to a measurement target, and output a reflected light signal
reflected from the measurement target, wherein the chromatically dispersed
light signal is focused at different positions along an optical axis of the
light signal, a detector configured to detect a wavelength of the reflected
light signal, among the plurality of wavelengths, received from the relay
optical system; and a processor configured to calculate a shape profile of the
measurement target based on a focal position of the wavelength of the
reflected light signal.

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OpenTechnical publication OT-2026-000000559
Published 2026-09-15T19:03:04.731299Z
https://opentechnical.org/p/OT-2026-000000559