---
publication_id: "OT-2026-000000585"
title: "Dechuck control method, dechuck control system, method of transferring substrate"
published_at: "2026-09-15T19:03:07.093206Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000000585"
categories:
  - "material-handling/conveying-systems"
keywords:
  - "b65g47/905"
---

# Dechuck control method, dechuck control system, method of transferring substrate

## Abstract

Provided herein may be a dechuck control method, a dechuck control system, and a method of transferring a substrate. The dechuck control method may include: providing a substrate and a carrier coupled to each other by an adhesive chuck; pushing the substrate by a dechuck pin including a pressure sensor, and acquiring, by the pressure sensor, pressure data associated with pushing the substrate by the dechuck pin; and controlling an operation of the dechuck pin based on the pressure data.