OPENTECHNICAL PUBLICATION
OT-2026-000000585

Dechuck control method, dechuck control system, method of transferring substrate

Published: 2026-09-15T19:03:07.093206Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000585
Categories: Material Handling > Conveying Systems

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ABSTRACT

Provided herein may be a dechuck control method, a dechuck control system, and
a method of transferring a substrate. The dechuck control method may include:
providing a substrate and a carrier coupled to each other by an adhesive
chuck; pushing the substrate by a dechuck pin including a pressure sensor, and
acquiring, by the pressure sensor, pressure data associated with pushing the
substrate by the dechuck pin; and controlling an operation of the dechuck pin
based on the pressure data.

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OpenTechnical publication OT-2026-000000585
Published 2026-09-15T19:03:07.093206Z
https://opentechnical.org/p/OT-2026-000000585