{
  "abstract": "A measurement method of a surface shape and a surface shape measurement device uses an interferometer optical head that acquires an interference fringe image generated by a light path difference between the reference light and the measurement light, acquires N interference fringe images by scanning from a start point to an end point in the Z-axis direction, and measures the surface shape of the measurement target surface based on the interference fringe images. For a common position in the N interference fringe images, regarding an interference signal including values of N points that indicates a change in the interference light intensity along the Z-axis direction, a phase of an interference fringe produced by the light of a predetermined analysis wavelength is determined, and the relative position in the Z-axis direction of the measurement target surface within the range of the analysis wavelength is determined based on the phase.",
  "canonical_url": "https://opentechnical.org/p/OT-2026-000000691",
  "categories": [
    "sensors-controls-machine-vision/position-and-presence-sensing"
  ],
  "extent": {
    "figures": 0,
    "paragraphs": 0,
    "words": 148
  },
  "figures": [],
  "files": [
    {
      "bytes": 10088,
      "media_type": "text/html; charset=utf-8",
      "name": "index.html",
      "sha256": "7fd1d20a682df66232dbe94b6f8d66f343fce74072cf14330c3cc4c0f3eef8ac"
    },
    {
      "bytes": 1464,
      "media_type": "text/markdown; charset=utf-8",
      "name": "publication.md",
      "sha256": "308dd5d4d57140f72233f64063ead582ce3c88c02d7bad4f98254c2c4aba50cb"
    },
    {
      "bytes": 1533,
      "media_type": "text/plain; charset=utf-8",
      "name": "publication.txt",
      "sha256": "9cece208db36ff014ce50dc0363c58e2635886ba48046a487eda432135d4664d"
    }
  ],
  "integrity": {
    "hash_algorithm": "sha256",
    "keys_url": "https://opentechnical.org/integrity/keys",
    "record_url": "https://opentechnical.org/p/OT-2026-000000691/integrity",
    "signature_algorithm": "Ed25519",
    "signature_file": "manifest.sig",
    "verify_url": "https://opentechnical.org/integrity/verify"
  },
  "keywords": [
    "g01b11/0608",
    "g01b11/2441",
    "g01b9/0209",
    "g06t2207/20048",
    "g06t7/55",
    "g06t7/60"
  ],
  "language": "en",
  "license": {
    "name": "Creative Commons Attribution 4.0 International",
    "url": "https://creativecommons.org/licenses/by/4.0/"
  },
  "publication_id": "OT-2026-000000691",
  "published_at": "2026-09-15T19:03:15.746518Z",
  "publisher": "Nebula Innovations Limited",
  "record_type": "record",
  "schema": "opentechnical-publication-manifest/1.0",
  "source_date": "2026-04-14",
  "source_id": "US-12601584-B2",
  "source_name": "the United States Patent and Trademark Office",
  "source_url": "https://patents.google.com/patent/US12601584B2",
  "supersedes": null,
  "title": "Measurement method of surface shape and surface shape measurement device",
  "uuid": "01a0a673-b422-7b1f-8bf3-4297b97066ef"
}