---
publication_id: "OT-2026-000000691"
title: "Measurement method of surface shape and surface shape measurement device"
published_at: "2026-09-15T19:03:15.746518Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000000691"
categories:
  - "sensors-controls-machine-vision/position-and-presence-sensing"
keywords:
  - "g01b11/0608"
  - "g01b11/2441"
  - "g01b9/0209"
  - "g06t2207/20048"
  - "g06t7/55"
  - "g06t7/60"
---

# Measurement method of surface shape and surface shape measurement device

## Abstract

A measurement method of a surface shape and a surface shape measurement device uses an interferometer optical head that acquires an interference fringe image generated by a light path difference between the reference light and the measurement light, acquires N interference fringe images by scanning from a start point to an end point in the Z-axis direction, and measures the surface shape of the measurement target surface based on the interference fringe images. For a common position in the N interference fringe images, regarding an interference signal including values of N points that indicates a change in the interference light intensity along the Z-axis direction, a phase of an interference fringe produced by the light of a predetermined analysis wavelength is determined, and the relative position in the Z-axis direction of the measurement target surface within the range of the analysis wavelength is determined based on the phase.