OPENTECHNICAL PUBLICATION
OT-2026-000000691

Measurement method of surface shape and surface shape measurement device

Published: 2026-09-15T19:03:15.746518Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000691
Categories: Sensors, Controls & Machine Vision > Position and Presence Sensing

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ABSTRACT

A measurement method of a surface shape and a surface shape measurement device
uses an interferometer optical head that acquires an interference fringe image
generated by a light path difference between the reference light and the
measurement light, acquires N interference fringe images by scanning from a
start point to an end point in the Z-axis direction, and measures the surface
shape of the measurement target surface based on the interference fringe
images. For a common position in the N interference fringe images, regarding
an interference signal including values of N points that indicates a change in
the interference light intensity along the Z-axis direction, a phase of an
interference fringe produced by the light of a predetermined analysis
wavelength is determined, and the relative position in the Z-axis direction of
the measurement target surface within the range of the analysis wavelength is
determined based on the phase.

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OpenTechnical publication OT-2026-000000691
Published 2026-09-15T19:03:15.746518Z
https://opentechnical.org/p/OT-2026-000000691