OPENTECHNICAL PUBLICATION
OT-2026-000000701

Gas exhaust apparatus and intake line automatic closing apparatus used for gas exhaust apparatus

Published: 2026-09-15T19:03:16.496771Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000701
Categories: Industrial Motion & Power Transmission > Fluid Power

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ABSTRACT

Provided is a gas exhaust apparatus for expelling a gas in a treatment space
of a wafer treatment apparatus to outside, the gas exhaust apparatus including
a main exhaust line connected to the treatment space, and an auxiliary exhaust
line having an end connected to the main exhaust line to supply an external
air current to the main exhaust line, wherein an automatic closer is disposed
at another end of the auxiliary exhaust line to close the other end of the
auxiliary exhaust line in a specific situation.

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OpenTechnical publication OT-2026-000000701
Published 2026-09-15T19:03:16.496771Z
https://opentechnical.org/p/OT-2026-000000701