OPENTECHNICAL PUBLICATION
OT-2026-000000719

Powder protecting three-way valve with cylindrical heating element

Published: 2026-09-15T19:03:17.904483Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000719
Categories: Industrial Motion & Power Transmission > Fluid Power

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ABSTRACT

A powder protecting three-way valve installed in a line of a semiconductor or
flat panel display manufacturing apparatus to control flow of reaction
by-product gas, includes: a valve casing comprising an inlet pipe through
which the reaction by-product gas flows in and a plurality of outlet pipes
through which the inflowing reaction by-product gas flows out in different
directions; a rotating ball which is rotatably installed inside the valve
casing and comprises an inlet hole communicating with the inlet pipe of the
valve casing and outlet holes selectively communicating with the plurality of
outlet pipes of the valve casing to control a direction of the flow of the
reaction by-product gas; and a heating element installed in the valve casing
to heat the inside of the valve casing.

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OpenTechnical publication OT-2026-000000719
Published 2026-09-15T19:03:17.904483Z
https://opentechnical.org/p/OT-2026-000000719