---
publication_id: "OT-2026-000000802"
title: "Laser processing method that includes use of a sheet that has transmissibility"
published_at: "2026-09-15T19:03:24.989642Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000000802"
categories:
  - "manufacturing-assembly-equipment/joining-and-welding"
keywords:
  - "b23k26/53"
  - "b23k2101/40"
  - "b23k26/702"
  - "b23k37/0408"
---

# Laser processing method that includes use of a sheet that has transmissibility

## Abstract

A processing method includes a holding step of holding a workpiece by a chuck table including a holding surface that holds the workpiece in an upper surface and a sheet covering step of covering the upper surface of the chuck table in addition to the workpiece by a sheet having transmissibility. The processing method also includes a close contact step of generating a suction force for the holding surface of the chuck table and reducing the pressure on a region covered by the sheet to bring the workpiece into close contact with the upper surface of the chuck table by an atmospheric pressure applied to the sheet and a modified layer forming step of positioning the focal point of a laser beam inside the workpiece through the sheet and irradiating the workpiece with the laser beam to form a modified layer.