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  "abstract": "An apparatus for holding a substrate includes a table, a lifting and lowering mechanism configured to mount a substrate on the table, and at least one pressing member configured to press the substrate to the table from the peripheral side of the substrate, in which the pressing member is movable upward and downward. The apparatus further includes at least one detector configured to detect a warp of the substrate mounted on the table from a peripheral side of the substrate, and a controller configured to control a movement of the pressing member in accordance to the detected warp.",
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  "title": "Method and apparatus for holding substrate",
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