OPENTECHNICAL PUBLICATION
OT-2026-000000825

Method and apparatus for holding substrate

Published: 2026-09-15T19:03:27.199005Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000825
Categories: Tools & Tooling > Clamping Tools

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ABSTRACT

An apparatus for holding a substrate includes a table, a lifting and lowering
mechanism configured to mount a substrate on the table, and at least one
pressing member configured to press the substrate to the table from the
peripheral side of the substrate, in which the pressing member is movable
upward and downward. The apparatus further includes at least one detector
configured to detect a warp of the substrate mounted on the table from a
peripheral side of the substrate, and a controller configured to control a
movement of the pressing member in accordance to the detected warp.

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OpenTechnical publication OT-2026-000000825
Published 2026-09-15T19:03:27.199005Z
https://opentechnical.org/p/OT-2026-000000825