---
publication_id: "OT-2026-000000838"
title: "Pressure sensor device having an oscillator including a membrane deformable to ambient differential pressure"
published_at: "2026-09-15T19:03:28.288326Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000000838"
categories:
  - "sensors-controls-machine-vision/force-and-pressure-sensing"
keywords:
  - "g01l19/14"
  - "g01l9/12"
---

# Pressure sensor device having an oscillator including a membrane deformable to ambient differential pressure

## Abstract

A pressure sensor device includes a base including joint portions to join to a mounting substrate, and an oscillator to oscillate with respect to the base. The oscillator includes a capacitor including a membrane that is deformable in accordance with an ambient pressure difference as a sensor electrode and a facing electrode spaced apart from the membrane. The membrane does not overlap the base in plan view in a direction orthogonal or substantially orthogonal to the membrane.