OPENTECHNICAL PUBLICATION
OT-2026-000000838

Pressure sensor device having an oscillator including a membrane deformable to ambient differential pressure

Published: 2026-09-15T19:03:28.288326Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000838
Categories: Sensors, Controls & Machine Vision > Force and Pressure Sensing

------------------------------------------------------------------------

ABSTRACT

A pressure sensor device includes a base including joint portions to join to a
mounting substrate, and an oscillator to oscillate with respect to the base.
The oscillator includes a capacitor including a membrane that is deformable in
accordance with an ambient pressure difference as a sensor electrode and a
facing electrode spaced apart from the membrane. The membrane does not overlap
the base in plan view in a direction orthogonal or substantially orthogonal to
the membrane.

------------------------------------------------------------------------

OpenTechnical publication OT-2026-000000838
Published 2026-09-15T19:03:28.288326Z
https://opentechnical.org/p/OT-2026-000000838