---
publication_id: "OT-2026-000000844"
title: "Detection system, compensation method, and computer readable medium for semiconductor surface morphology"
published_at: "2026-09-15T19:03:28.750962Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000000844"
categories:
  - "sensors-controls-machine-vision/position-and-presence-sensing"
keywords:
  - "g01b9/02084"
  - "g01b11/0608"
  - "g01b2210/56"
  - "g01b9/0203"
  - "g01b9/02067"
  - "g01b9/04"
---

# Detection system, compensation method, and computer readable medium for semiconductor surface morphology

## Abstract

Provided are a detection system, compensation method and computer-readable recording medium applicable to semiconductor surface morphology to provide feature information corresponding to spectral signals to a neural network model and provide feature information corresponding to spectral signals, a detected height, and an actual height actually measured to another neural network model. The combinational neural network models thus trained and built can generate a compensation value for a to-correct height corresponding to a to-correct spectral signal having variability. The compensation value provides required compensation for height information to not only enhance the precision of the detection of semiconductor surface morphology but also enhance the reliability of the detection system.