OPENTECHNICAL PUBLICATION
OT-2026-000000844

Detection system, compensation method, and computer readable medium for semiconductor surface morphology

Published: 2026-09-15T19:03:28.750962Z
Permanent URL: https://opentechnical.org/p/OT-2026-000000844
Categories: Sensors, Controls & Machine Vision > Position and Presence Sensing

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ABSTRACT

Provided are a detection system, compensation method and computer-readable
recording medium applicable to semiconductor surface morphology to provide
feature information corresponding to spectral signals to a neural network
model and provide feature information corresponding to spectral signals, a
detected height, and an actual height actually measured to another neural
network model. The combinational neural network models thus trained and built
can generate a compensation value for a to-correct height corresponding to a
to-correct spectral signal having variability. The compensation value provides
required compensation for height information to not only enhance the precision
of the detection of semiconductor surface morphology but also enhance the
reliability of the detection system.

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OpenTechnical publication OT-2026-000000844
Published 2026-09-15T19:03:28.750962Z
https://opentechnical.org/p/OT-2026-000000844