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  "abstract": "A three-dimensional measurement device includes: an irradiator that emits a predetermined light; an optical system that splits the predetermined light into two lights, irradiates a measurement object with a measurement light and irradiates a reference plane with a reference light, and emits a combined light; an imaging device that takes an image of the combined light and obtains an interference fringe image; an objective lens for the measurement light that directs the measurement light toward the measurement object; an objective lens for the reference light that directs the reference light toward the reference plane; an imaging lens that forms an image of the combined light on the imaging device; and a control device that executes three-dimensional measurement of a measurement area on the measurement object based on the interference fringe image.",
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  "title": "Three-dimensional measurement device",
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