---
publication_id: "OT-2026-000001174"
title: "Substrate transfer apparatus and substrate transfer method"
published_at: "2026-09-15T19:03:58.371977Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000001174"
categories:
  - "robotics-automation/robot-architectures"
keywords:
  - "b25j15/0014"
  - "b25j15/0014"
  - "b25j11/00"
  - "b25j11/0095"
  - "b25j11/0095"
  - "b25j15/00"
---

# Substrate transfer apparatus and substrate transfer method

## Abstract

A substrate transfer apparatus according to one or more embodiments may include substrate transfer apparatus including: an end effector including: a hand that grips a substrate; and a plunger that comes into contact with the substrate and performs alignment of the substrate comprising a contact portion that comes into contact with the substrate by moving in a substrate direction. A contact portion of the substrate transfer apparatus according to one or more embodiments includes a contact bottom surface that comes into contact with the substrate and is inclined so that a thickness decreases toward a tip of the contact portion.