OPENTECHNICAL PUBLICATION
OT-2026-000001174

Substrate transfer apparatus and substrate transfer method

Published: 2026-09-15T19:03:58.371977Z
Permanent URL: https://opentechnical.org/p/OT-2026-000001174
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

A substrate transfer apparatus according to one or more embodiments may
include substrate transfer apparatus including: an end effector including: a
hand that grips a substrate; and a plunger that comes into contact with the
substrate and performs alignment of the substrate comprising a contact portion
that comes into contact with the substrate by moving in a substrate direction.
A contact portion of the substrate transfer apparatus according to one or more
embodiments includes a contact bottom surface that comes into contact with the
substrate and is inclined so that a thickness decreases toward a tip of the
contact portion.

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OpenTechnical publication OT-2026-000001174
Published 2026-09-15T19:03:58.371977Z
https://opentechnical.org/p/OT-2026-000001174