---
publication_id: "OT-2026-000001214"
title: "System of processing substrate, transfer method, transfer program, and holder"
published_at: "2026-09-15T19:04:11.108705Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000001214"
categories:
  - "robotics-automation/robot-architectures"
keywords:
  - "b25j21/005"
  - "h01j37/3288"
  - "h10p72/3302"
  - "h10p72/3304"
  - "h10p72/3304"
  - "b25j11/00"
---

# System of processing substrate, transfer method, transfer program, and holder

## Abstract

A system of processing a substrate includes an atmospheric-pressure transfer chamber, at least one vacuum processing chamber, at least two load-lock modules, a vacuum transfer chamber, a plurality of load ports, and a first transfer mechanism and a second transfer mechanism. The load ports are attached to the atmospheric-pressure transfer chamber and detachable containers are mounted on the load ports, respectively. A controller controls the first transfer mechanism and the second transfer mechanism to concurrently transfer a used consumable from the containers to the vacuum processing chamber through the atmospheric-pressure transfer chamber and one of the load-lock modules and to transfer a used consumable from the vacuum processing chamber through the vacuum transfer chamber and another one of the load-lock modules.