OPENTECHNICAL PUBLICATION
OT-2026-000001214

System of processing substrate, transfer method, transfer program, and holder

Published: 2026-09-15T19:04:11.108705Z
Permanent URL: https://opentechnical.org/p/OT-2026-000001214
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

A system of processing a substrate includes an atmospheric-pressure transfer
chamber, at least one vacuum processing chamber, at least two load-lock
modules, a vacuum transfer chamber, a plurality of load ports, and a first
transfer mechanism and a second transfer mechanism. The load ports are
attached to the atmospheric-pressure transfer chamber and detachable
containers are mounted on the load ports, respectively. A controller controls
the first transfer mechanism and the second transfer mechanism to concurrently
transfer a used consumable from the containers to the vacuum processing
chamber through the atmospheric-pressure transfer chamber and one of the
load-lock modules and to transfer a used consumable from the vacuum processing
chamber through the vacuum transfer chamber and another one of the load-lock
modules.

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OpenTechnical publication OT-2026-000001214
Published 2026-09-15T19:04:11.108705Z
https://opentechnical.org/p/OT-2026-000001214