{
  "abstract": "A substrate transfer method according to one or more embodiments is disclosed that may include moving a hand of a substrate transfer apparatus to a lower part of a substrate, moving a plunger of the substrate transfer apparatus to increase a pocket size that is a distance between a substrate contact portion of the hand and the plunger of the substrate transfer apparatus, picking up the substrate, and moving the plunger to decrease the distance between the substrate contact portion and the plunger of the substrate transfer apparatus and to a position that the substrate is not gripped.",
  "assignees": [
    "KAWASAKI HEAVY IND LTD",
    "KAWASAKI ROBOTICS USA INC"
  ],
  "authors": [
    "KURATA IORI",
    "NAKAHARA HAJIME",
    "TAN HARUHIKO"
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    "name": "Creative Commons Attribution 4.0 International",
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  "publication_id": "OT-2026-000001215",
  "published_at": "2026-09-15T19:04:11.434825Z",
  "publisher": "Nebula Innovations Limited",
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  "source_date": "2026-04-02",
  "source_id": "US-2026091505-A1",
  "source_name": "the United States Patent and Trademark Office",
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  "supersedes": null,
  "title": "Substrate transfer apparatus and substrate transfer method",
  "uuid": "01a0a674-8daa-7057-9c17-ffd372fe5053"
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