OPENTECHNICAL PUBLICATION
OT-2026-000001215

Substrate transfer apparatus and substrate transfer method

Published: 2026-09-15T19:04:11.434825Z
Permanent URL: https://opentechnical.org/p/OT-2026-000001215
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

A substrate transfer method according to one or more embodiments is disclosed
that may include moving a hand of a substrate transfer apparatus to a lower
part of a substrate, moving a plunger of the substrate transfer apparatus to
increase a pocket size that is a distance between a substrate contact portion
of the hand and the plunger of the substrate transfer apparatus, picking up
the substrate, and moving the plunger to decrease the distance between the
substrate contact portion and the plunger of the substrate transfer apparatus
and to a position that the substrate is not gripped.

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OpenTechnical publication OT-2026-000001215
Published 2026-09-15T19:04:11.434825Z
https://opentechnical.org/p/OT-2026-000001215