OPENTECHNICAL PUBLICATION
OT-2026-000001233

Work apparatus and carry-in/out apparatus

Published: 2026-09-15T19:04:19.705795Z
Permanent URL: https://opentechnical.org/p/OT-2026-000001233
Categories: Material Handling > Conveying Systems

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ABSTRACT

A work apparatus comprises a carry-in/out mechanism and a moving mechanism for
moving the carry-in/out mechanism, wherein the carry-in/out mechanism includes
a substrate support member for supporting a substrate, an
advancement/retraction mechanism for advancing/retracting the substrate
support member, a substrate conveyance mechanism for conveying the substrate,
and a lifting/lowering mechanism for lifting/lowering the substrate conveyance
mechanism, the advancement/retraction mechanism includes a base end portion
support member for supporting a base end portion of the substrate support
member, and a drive portion for moving the base end portion support member,
the base end portion is provided at an end portion of the substrate support
member, and the lifting/lowering mechanism lifts/lowers the substrate
conveyance mechanism and the substrate is transferred between the substrate
support member and the substrate conveyance mechanism.

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OpenTechnical publication OT-2026-000001233
Published 2026-09-15T19:04:19.705795Z
https://opentechnical.org/p/OT-2026-000001233