{
  "abstract": "Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal retainers may be used to retain the seals during assembly of fluid flow components into apparatus for controlling flow.",
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    "ICHOR SYSTEMS INC"
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    "CARSON STEPHEN",
    "TREUR RANDOLPH"
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  "source_date": "2026-03-31",
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  "supersedes": null,
  "title": "Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module",
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