OPENTECHNICAL PUBLICATION
OT-2026-000001365

Transfer unit and substrate treatment apparatus including the same

Published: 2026-09-15T19:05:23.850543Z
Permanent URL: https://opentechnical.org/p/OT-2026-000001365
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

Provided are a transfer unit and a substrate treatment apparatus which can
stably vacuum-adsorb a substrate and can be used for a long time. The transfer
unit includes: a robot arm; and an end effector connected to the robot arm,
wherein the end effector includes: a body; a vacuum hole formed in the body;
and a pad installed on the body to surround the vacuum hole and including a
first pad layer and a second pad layer stacked sequentially, wherein the first
pad layer has greater elasticity than the second pad layer, and the second pad
layer has greater hardness than the first pad layer.

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OpenTechnical publication OT-2026-000001365
Published 2026-09-15T19:05:23.850543Z
https://opentechnical.org/p/OT-2026-000001365