OPENTECHNICAL PUBLICATION
OT-2026-000001397

Teaching Method for Substrate Transfer Device and Substrate Processing Apparatus

Published: 2026-09-15T19:05:35.390286Z
Permanent URL: https://opentechnical.org/p/OT-2026-000001397
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

There is a teaching method for a substrate transfer device is disclosed. The
method includes moving a transfer arm to multiple set positions along a
reference axis selected from multiple axes extending through a center and a
periphery of a placing surface, and executing at each set position a cycle
comprising: moving the transfer arm holding a substrate at a preset holding
position; transferring the substrate from the arm to a placing table via lift
pins; receiving the substrate back by the arm via the lift pins; and detecting
a new holding position of the substrate. Based on the new holding position, it
is determined whether the substrate was mounted on an edge portion. A target
position for transfer from the arm to the placing table is determined
according to the set positions for the reference axes, and the target position
is set as the arm's set position.

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OpenTechnical publication OT-2026-000001397
Published 2026-09-15T19:05:35.390286Z
https://opentechnical.org/p/OT-2026-000001397