{
  "abstract": "An automatic teaching system configured for teaching a position of a semiconductor wafer relative to a semiconductor system includes a dummy wafer with a mark and a first sensor fixed to a first device. The semiconductor system includes the first device, which includes a holder, and a second device, which includes an end effector configured to transport the semiconductor wafer between the first device and the second device. The dummy wafer is or is to be either removed from the holder by the end effector or placed on the holder by the end effector. The first sensor is configured to determine a position of the dummy wafer by locating two opposite first edge-points of the mark after the end effector moves the dummy wafer back and forth along a first axis within the first device.",
  "assignees": [
    "BRIGHTEST TECH TAIWAN CO LTD"
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  "authors": [
    "LEE HSIU-YU",
    "TSENG KUO-FENG",
    "YANG HAO-YU"
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  "title": "Automatic Teaching System and Automatic Teaching Method Thereof",
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