OPENTECHNICAL PUBLICATION
OT-2026-000001405

Automatic Teaching System and Automatic Teaching Method Thereof

Published: 2026-09-15T19:05:38.324768Z
Permanent URL: https://opentechnical.org/p/OT-2026-000001405
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

An automatic teaching system configured for teaching a position of a
semiconductor wafer relative to a semiconductor system includes a dummy wafer
with a mark and a first sensor fixed to a first device. The semiconductor
system includes the first device, which includes a holder, and a second
device, which includes an end effector configured to transport the
semiconductor wafer between the first device and the second device. The dummy
wafer is or is to be either removed from the holder by the end effector or
placed on the holder by the end effector. The first sensor is configured to
determine a position of the dummy wafer by locating two opposite first
edge-points of the mark after the end effector moves the dummy wafer back and
forth along a first axis within the first device.

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OpenTechnical publication OT-2026-000001405
Published 2026-09-15T19:05:38.324768Z
https://opentechnical.org/p/OT-2026-000001405