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  "abstract": "A transfer system includes a robot and a controller that controls an operation of the robot. The robot includes a hand that transfers a substrate, and a lift mechanism that moves up and down the hand. The hand includes a sensor that detects a distance to a lower surface of the substrate. The controller includes a storage unit, a detection unit, and a calculation unit. The storage unit stores placement information including a placement height at a placement position of the substrate. The detection unit detects a separation height at which the substrate is separated from the hand when the hand is moved down from the placement height. The calculation unit calculates a deflection amount of the substrate based on a difference between the placement height and the separation height.",
  "assignees": [
    "KK YASAKAWA DENKI",
    "YASKAWA ELECTRIC CORP"
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  "authors": [
    "TARUNO MAKOTO"
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  "source_date": "2026-03-24",
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  "title": "Transfer system and transfer method",
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