OPENTECHNICAL PUBLICATION
OT-2026-000001554

Transfer system and transfer method

Published: 2026-09-15T19:06:38.324143Z
Permanent URL: https://opentechnical.org/p/OT-2026-000001554
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

A transfer system includes a robot and a controller that controls an operation
of the robot. The robot includes a hand that transfers a substrate, and a lift
mechanism that moves up and down the hand. The hand includes a sensor that
detects a distance to a lower surface of the substrate. The controller
includes a storage unit, a detection unit, and a calculation unit. The storage
unit stores placement information including a placement height at a placement
position of the substrate. The detection unit detects a separation height at
which the substrate is separated from the hand when the hand is moved down
from the placement height. The calculation unit calculates a deflection amount
of the substrate based on a difference between the placement height and the
separation height.

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OpenTechnical publication OT-2026-000001554
Published 2026-09-15T19:06:38.324143Z
https://opentechnical.org/p/OT-2026-000001554