{
  "abstract": "Proposed are article storage equipment in a semiconductor fabrication facility, the article storage equipment being capable of power supply with a more simplified configuration, and a logistics system of a semiconductor fabrication facility including the same. Article storage equipment in a semiconductor fabrication facility according to one aspect includes a storage unit installed around a rail that provides a travel route of a transport vehicle and configured to store a transport container in which a wafer is accommodated, a purge unit configured to supply an inert gas into the transport container, a control unit configured to identify the transport container stored in the storage unit and control the purge unit to supply the inert gas into the transport container, and a power supply unit configured to supply a current induced from a power supply cable installed along the rail to the control unit.",
  "assignees": [
    "SEMES CO LTD"
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  "authors": [
    "LEE SUNG HO"
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  "source_date": "2026-03-24",
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  "title": "Article storage equipment in semiconductor fabrication facility and logistics system including same",
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