---
publication_id: "OT-2026-000001581"
title: "Article storage equipment in semiconductor fabrication facility and logistics system including same"
published_at: "2026-09-15T19:06:48.827933Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000001581"
categories:
  - "material-handling/conveying-systems"
keywords:
  - "b65g37/00"
  - "h01l21/67769"
  - "h10p72/3204"
  - "h10p72/3404"
  - "h10p72/3404"
  - "b65g2201/0297"
---

# Article storage equipment in semiconductor fabrication facility and logistics system including same

## Abstract

Proposed are article storage equipment in a semiconductor fabrication facility, the article storage equipment being capable of power supply with a more simplified configuration, and a logistics system of a semiconductor fabrication facility including the same. Article storage equipment in a semiconductor fabrication facility according to one aspect includes a storage unit installed around a rail that provides a travel route of a transport vehicle and configured to store a transport container in which a wafer is accommodated, a purge unit configured to supply an inert gas into the transport container, a control unit configured to identify the transport container stored in the storage unit and control the purge unit to supply the inert gas into the transport container, and a power supply unit configured to supply a current induced from a power supply cable installed along the rail to the control unit.