OPENTECHNICAL PUBLICATION
OT-2026-000001581

Article storage equipment in semiconductor fabrication facility and logistics system including same

Published: 2026-09-15T19:06:48.827933Z
Permanent URL: https://opentechnical.org/p/OT-2026-000001581
Categories: Material Handling > Conveying Systems

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ABSTRACT

Proposed are article storage equipment in a semiconductor fabrication
facility, the article storage equipment being capable of power supply with a
more simplified configuration, and a logistics system of a semiconductor
fabrication facility including the same. Article storage equipment in a
semiconductor fabrication facility according to one aspect includes a storage
unit installed around a rail that provides a travel route of a transport
vehicle and configured to store a transport container in which a wafer is
accommodated, a purge unit configured to supply an inert gas into the
transport container, a control unit configured to identify the transport
container stored in the storage unit and control the purge unit to supply the
inert gas into the transport container, and a power supply unit configured to
supply a current induced from a power supply cable installed along the rail to
the control unit.

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OpenTechnical publication OT-2026-000001581
Published 2026-09-15T19:06:48.827933Z
https://opentechnical.org/p/OT-2026-000001581