---
publication_id: "OT-2026-000001672"
title: "Methods and systems for deposition to gaps using an inhibitor"
published_at: "2026-09-15T19:07:32.594034Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000001672"
categories:
  - "tools-tooling/clamping-tools"
keywords:
  - "b25b23/005"
  - "b25b23/005"
  - "b25b23/005"
  - "b25b23/00"
  - "b25b23/10"
  - "b25b23/10"
---

# Methods and systems for deposition to gaps using an inhibitor

## Abstract

The present disclosure is directed to methods and systems for depositing a material within a gap of a substrate in a cyclic deposition process. The methods and systems utilize an inhibitor to preferentially blocks chemisorption of a subsequently introduced first precursor at a portion of available chemisorption sites in the gap to promote deeper penetration of the first precursor into the gap and/or more uniform chemisorption of the first precursor in the gap used in forming a desired material.